|
| |
 |
Recent
Advances and Perspectives in Synchrotron Radiation TXRF |
|
K. Baur , J. Kerner,
S. Brennan, A. Singh, and P. Pianetta,
Aluminum Impurities in Silicon: Investigation of X-ray Raman Scattering
in Total Reflection X-ray Fluorescence Spectroscopy, Journal of
Applied Physics, 2000. |
|
J. Wang, P. Pianetta,
K. Baur, and S. Brennan, Analytical
Techniques for Trace Elemental Analyses on Wafer Surfaces for Monitoring
and Controlling Contamination, ? , 2000. |
|
K. Baur, A. Singh, J.
Wang, J. Kerner, and P. Pianetta, Investigation
of Na impurities on Si wafer surfaces using TXRF, SRI Conference
Proceedings, 161, 2000. |
|
P. Pianetta, K. Baur,
A.Singh, S. Brennan, J. Kerner, D. Werho, and J. Wang. Pianetta, Application
of Synchrotron Radiation to TXRF Analysis of Metal Contamnation on
Silicon Wafer Surfaces, Thin Solid Films, 1999. |
|
S. Brennan, P. Pianetta,
S. Ghosh, N. Takaura, C Wiemer, A Fischer-Colbrie, S Laderman, A.
Shimazaki, A. Waldhauer, M.A. Zaitz, Update
on Synchrotron Radiation TXRF: New Results, MRS, 1998. |
|
|
|
